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SEMITOOL™

Spin Rinse Dryers

Semitool Double Stack, Single Stack, and Benchtop Models
are available as fully refurbished units.  Contact us for availability
or to discuss how we can support your legacy SRDs.
Center Gradient Transparent
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S Model
Features

  • Brushless Motor

  • Labyrinth Seal

  • Rotor - Quick Disconnect

  • Controller - 102 or 101

  • Plastic (Aero Style)

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F Model
Features

  • Brushless Motor

  • Ferrofluidic Seal

  • Rotor - 4 Bolt

  • Controller - 101

  • Plastic (Block Style)

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ST Model
Features

  • Brushless Motor

  • Ferrofluidic Seal

  • Rotor - 4 Bolt

  • Controller - 328

  • Plastic (Block Style)

S Model
S Model SRDs
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Wafer/Cassette Size

300mm / 12" & 

200mm / 8" High Profile

200mm / 8" Low Profile

150mm / 6"

125mm / 5"

100mm / 4"

Double Stack

8300S

880S

870S

860S

840S

Single Stack

4300S

480S

470S

460S

440S

Benchtop

2300S

280S

270S

260S

240S

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F Model
F Model SRDs
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Wafer/Cassette Size

300mm / 12" & 

200mm / 8" High Profile

200mm / 8" Low Profile

150mm / 6"

125mm / 5"

100mm / 4"

Double Stack

8300F

880F

870F

860F

840F

Single Stack

4300F

480F

470F

460F

440F

Benchtop

2300F

280F

270F

260F

240F

ST Model
ST Model SRDs
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Wafer/Cassette Size

300mm / 12" & 

200mm / 8" High Profile

200mm / 8" Low Profile

150mm / 6"

125mm / 5"

100mm / 4"

Double Stack

8300ST

880ST

870ST

860ST

840ST

Single Stack

4300ST

480ST

470ST

460ST

440ST

Benchtop

2300ST

280ST

270ST

260ST

240ST

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